Al Microheater and Ni Temperature Sensor Set based-on Photolithography with Closed-Loop Control
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Journal of Electrical and Computer Engineering (IJECE)
سال: 2015
ISSN: 2088-8708,2088-8708
DOI: 10.11591/ijece.v5i4.pp849-858